Infrared wire-grid polarizer with sol-gel antireflection films on both sides

被引：0

作者：

Yamada, Itsunari ^{[1
,2
]}

Ishihara, Yoshiro ^{[1
]}

机构：

[1] Univ Shiga Prefecture, Sch Engn, Dept Elect Syst Engn, Hikone, Shiga 5228533, Japan

[2] Univ Shiga Prefecture, Sch Engn, Ctr Glass Sci & Technol, Hikone, Shiga 5228533, Japan

来源：

PHOTONICS, DEVICES, AND SYSTEMS VII | 2017年 / 10603卷

关键词：

infrared wire-grid polarizer; sol-gel method; imprint process; antireflective coating; FABRICATION; NANOPATTERNS; GRATINGS; ARRAY; UV;

D O I：

10.1117/12.2288835

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated an infrared wire-grid polarizer with the high transverse magnetic (TM) polarization transmittance and high extinction ratio by soft imprint lithography, sol-gel method, and Al shadow coating processes. A zilconia film was coated on Si substrate by using sol-gel method and spin coating method. Then, sol-gel zirconia grating was formed on the back side using imprinting using a silicone mold. The polarizer was produced by depositing Al obliquely on the grating. The TM transmittance of the fabricated element was greater than 80% at a wavelength of 4.8 mu m. The sol-gel zilconia films acted as antireflection films. The extinction ratio exceeded 26 dB at its wavelength.

引用

页数：7

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