The Effect of Oxygen Flow Rates on the Electrical Resistivity of MgO Thin Films in AC-PDPs

被引：0
|
作者：
Chou, Hong-Chieh [1 ]
Kim, Sung-O [1 ]
Chen, Kuang-Lang
Chen, Samuel
Lee, Chien-Pang
Hsu, Chien-Hsing
Chou, Kuo-Ching
Huang, Chih-Ming
机构：
[1] Natl Chiao Tung Univ, Lab Nanosyst & Plasma, Dept Photon, Hsinchu 300, Taiwan
来源：
IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS | 2006年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Magnesium oxide thin films were deposited with different thickness and oxygen flow rates for investigation the effects of the electrical resistivity of MgO thin films in AC-PDPs. The surface roughness was characterized by AFM. It reveals that higher oxygen flow rate generates higher electrical resistivity of MgO thin films.
引用
收藏
页码：383 / 386
页数：4
相关论文
共 50 条
  • [1] The sputtering yield of the MgO protective layer in AC-PDPs
    Lee, H. J.
    Son, C. G.
    Jung, S. H.
    Han, Y. K.
    Lee, S. B.
    Ybo, N. L.
    Lim, J. E.
    Lee, J. H.
    Song, K. B.
    Moon, M. W.
    Ko, B. D.
    Oh, P. Y.
    Jeong, J. M.
    Jung, W. H.
    Jung, K. W.
    Hyun, J. W.
    Kang, S. O.
    Choi, E. H.
    IDW/AD '05: PROCEEDINGS OF THE 12TH INTERNATIONAL DISPLAY WORKSHOPS IN CONJUNCTION WITH ASIA DISPLAY 2005, VOLS 1 AND 2, 2005, : 1523 - 1526
  • [2] Measurement of Energy bands of the MgO Layer in AC-PDPs
    Jeoung, S. J.
    Lee, H. J.
    Son, C. G.
    Kim, J. H.
    Park, E. Y.
    Hong, Y. J.
    You, N. L.
    Lee, S. B.
    Han, Y. G.
    Jeoung, S. H.
    Song, K. B.
    Moon, M. W.
    Oh, P. Y.
    Choi, E. H.
    IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS, 2006, : 906 - 909
  • [3] The effects of high purity MgO nano-powders on the electrical properties of AC-PDPs
    Choi, Jong-Seo
    Moon, Sung-Hwan
    Kim, Jae-Hyuk
    Kim, Gil-Ho
    CURRENT APPLIED PHYSICS, 2010, 10 (06) : 1378 - 1382
  • [4] Characteristics of MgO protective layer with deposition rate in AC-PDPs
    Hong, Sung Hee
    Park, E. Y.
    Son, C. G.
    Jung, S. J.
    Lee, S. S.
    Cho, S. H.
    Kim, J. H.
    Hong, Y. J.
    Han, Y. G.
    Song, K. B.
    Moon, M. W.
    Cho, G. S.
    Choi, E. H.
    IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2007, : 195 - 198
  • [5] Electron emission characteristics of MgO thin films used for ac-PDPs: Part I. Secondary electron emission
    Kim, Yong-Seog
    Yoon, Sang-Hoon
    Ahn, Seok-Geun
    Hong, Cho-Rong
    Yang, Heesun
    ELECTRONIC MATERIALS LETTERS, 2008, 4 (03) : 113 - 129
  • [6] Wall charge evolution models and emission of exoelectrons from MgO thin film of ac-PDPs
    Kim, Yong-Seog
    Yoon, Sang-Hoon
    Yang, Heesun
    JOURNAL OF APPLIED PHYSICS, 2010, 107 (01)
  • [7] A study on MgO powder and MgO liquid binder in the screen-printed protective layer for AC-PDPs
    Koiwa, I
    Kanehara, T
    Mita, J
    IEICE TRANSACTIONS ON ELECTRONICS, 1996, E79C (04) : 580 - 586
  • [8] Effect of Seed Particles on Exaggerated Grain Growth of Redeposited MgO Layer during Accelerated Discharge Testing of AC-PDPs
    Kwon, Sang-Koo
    Kim, Jeong-Ho
    Moon, Seung-Kyu
    Choi, Jong-Kwon
    Jang, Young-Il
    Park, Kyu-Ho
    Han, Sung-Su
    2009 SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS, VOL XL, BOOKS I - III, 2009, : 359 - 362
  • [9] Effect of secondary electron emission by Xe+ on firing voltage in AC-PDPs
    Kitagaki, M.
    Uchida, K.
    Tsutsumi, K.
    Uchida, G.
    Kajiyama, H.
    Shinoda, T.
    IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2007, : 213 - +
  • [10] Invited Paper: Control of Temperature Dependency of Exo-electron Emission Behavior for MgO Film of ac-PDPs
    Yoon, Sang-Hoon
    Ahn, Seok-Geun
    Kim, Yong-Seog
    2009 SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS, VOL XL, BOOKS I - III, 2009, : 352 - 355
12345