Micromachined tunable Fabry-Perot filters for wavelength division multiplexing

被引：3
|
作者：
Larson, MC [1 ]
Harris, JS [1 ]
机构：
[1] STANFORD UNIV,SOLID STATE ELECTR LAB,STANFORD,CA 94305
来源：
WAVELENGTH DIVISION MULTIPLEXING COMPONENTS | 1996年 / 2690卷
关键词：
micromachining; micro-electromechanical systems (MEMS); micro-optics; deformable membranes; wavelength tuning; vertical cavities; Fabry-Perot filters; tunable filters; tunable lasers; vertical-cavity surface-emitting lasers (VCSEL);
D O I：
10.1117/12.238912
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：172 / 183
页数：12
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