共 50 条
- [41] Low-temperature preparation of crystallized zirconia films by ECR plasma MOCVD SURFACE ENGINEERING FOR MANUFACTURING APPLICATIONS, 2006, 890 : 183 - +
- [45] Low-temperature growth of polycrystalline AlN films by microwave plasma CVD Someno, Yoshihiro, 1600, (29):
- [46] Low-temperature plasma etching of copper films using ultraviolet irradiation JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (11): : 5945 - 5948
- [47] LOW-TEMPERATURE SYNTHESIS OF DIAMOND FILMS USING MAGNETOMICROWAVE PLASMA CVD JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (08): : L1483 - L1485