HIGH SENSITIVITY SURFACE ACOUSTIC WAVE STRAIN SENSOR BASED ON PMN-PT THICK FILM

被引：0

作者：

Li, Qing ^{[1
]}

Lu, Lijun ^{[1
]}

Tian, Yingwei ^{[1
]}

Yi, Zhiran ^{[1
]}

Liu, Jingquan ^{[1
]}

Yang, Bin ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Dept Micro Nano Elect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

来源：

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年

关键词：

Surface acoustic wave; piezoelectric thick film; PMN-PT; strain sensor;

D O I：

10.1109/transducers.2019.8808215

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, piezoelectric single crystal PMN-PT was processed by chemical and mechanical polishing method to form a surface acoustic wave (SAW) device for strain measurement. A wide measurement range and high sensitivity of this developed strain sensor were achieved, where the strain measurement range was 1000 mu epsilon and the sensitivity achieved 1160,46 Hz/mu epsilon. At the same time, the stability of SAW strain sensors was good. This small size (6.58 mm x 4.19 mm x 60 mu m) and high sensitivity SAW strain sensor could be used for structural calibration, machine inspection, and aerospace detector in the future.

引用

页码：1866 / 1869

页数：4

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