HIGH SENSITIVITY SURFACE ACOUSTIC WAVE STRAIN SENSOR BASED ON PMN-PT THICK FILM

In this paper, piezoelectric single crystal PMN-PT was processed by chemical and mechanical polishing method to form a surface acoustic wave (SAW) device for strain measurement. A wide measurement range and high sensitivity of this developed strain sensor were achieved, where the strain measurement range was 1000 mu epsilon and the sensitivity achieved 1160,46 Hz/mu epsilon. At the same time, the stability of SAW strain sensors was good. This small size (6.58 mm x 4.19 mm x 60 mu m) and high sensitivity SAW strain sensor could be used for structural calibration, machine inspection, and aerospace detector in the future.