In situ infrared spectroscopic study of cubic boron nitride thin film delamination

被引：0
|
作者：
Yang Hang-Sheng [1 ]
Zhang Jian-Ying [1 ]
Nie An-Min [1 ]
Zhang Xiao-Bin [1 ]
机构：
[1] Zhejiang Univ, Dept Mat Sci & Engn, Hangzhou 310027, Peoples R China
来源：
CHINESE PHYSICS B | 2008年 / 17卷 / 09期
基金：
美国国家科学基金会;
关键词：
cubic boron nitride films; infrared spectroscopy; delamination; compressive stress relaxation;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
This paper investigates the procedure of cubic boron nitride (cBN) thin film delamination by Fourier-transform infrared (IR) spectroscopy. It finds that the apparent IR absorption peak area near 1380 cm(-1) and 1074 cm(-1) attributed to the B-N stretching vibration of sp(2)-bonded BN and the transverse optical phonon of cBN, respectively, increased up to 195% and 175% of the original peak area after film delamination induced compressive stress relaxation. The increase of IR absorption of sp(2)-bonded BN is found to be non-linear and hysteretic to film delamination, which suggests that the relaxation of the turbostratic BN (tBN) layer from the compressed condition is also hysteretic to film delamination. Moreover, cross-sectional transmission electron microscopic observation revealed that cBN film delamination is possible from near the aBN(amorphous BN)/tBN interface at least for films prepared by plasma-enhanced chemical vapour deposition.
引用
收藏
页码：3453 / 3458
页数：6
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