Fabrication of Mach-Zehnder Polymer Waveguides by a Direct-Drawing Technique Using a Focused Proton Beam

被引：5

作者：

Miura, Kenta ^{[1
]}

Satoh, Takahiro ^{[2
]}

Ishii, Yasuyuki ^{[2
]}

Kiryu, Hiromu ^{[1
]}

Ozawa, Yusuke ^{[1
]}

Kohka, Masashi ^{[2
]}

Takano, Katsuyoshi ^{[3
]}

Ohkubo, Takeru ^{[2
]}

Yamazaki, Akiyoshi

Kada, Wataru ^{[2
]}

Yokoyama, Akihito ^{[2
]}

Kamiya, Tomihiro ^{[2
]}

Hanaizumi, Osamu ^{[1
]}

机构：

[1] Gunma Univ, Grad Sch Engn, 1-5-1 Tenjin Cho, Kiryu, Gunma 3768515, Japan

[2] Japan Atom Energy Agcy, Takasaki Adv Radiat Res Inst, Takasaki, Gunma, Japan

[3] Osaka Univ, Grad Sch Engn, Osaka, Japan

来源：

ADVANCED MICRO-DEVICE ENGINEERING III | 2013年 / 534卷

关键词：

proton beam writing; PMMA; Mach-Zehnder waveguide; thermo-optic switch;

D O I：

10.4028/www.scientific.net/KEM.534.158

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Proton beam writing (PBW) has recently attracted much attention as a next-generation microfabrication technology. This is a direct-drawing technique and does not need any masks to transfer micropatterns to sample surfaces. In our previous work, we demonstrated the first single-mode straight-line and Y-junction PMMA-based waveguides fabricated using PBW and working at lambda = 1.55 mu m. In this work, we fabricated the first PMMA-based Mach-Zehnder waveguides for the wavelength utilizing PBW in order to construct thermo-optic switches.

引用

页码：158 / +

页数：2

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