Three-dimensional surface imaging by the directional signal detection

被引：0
|
作者：
Slowko, W [1 ]
机构：
[1] Wroclaw Univ Technol, Inst Microsyst Technol, PL-50372 Wroclaw, Poland
来源：
NUKLEONIKA | 1999年 / 44卷 / 02期
关键词：
D O I：
暂无
中图分类号：
O61 [无机化学];
学科分类号：
070301 ; 081704 ;
摘要：
A method for three dimensional reconstruction of the surface topography based on the "shape from signal distribution" rule is presented. It consists in directional detection of the secondary electron signal and its processing according to the formulas described. The topography can be displayed in a form of the surface profiles or fully three dimensionally in an axonometric view.
引用
收藏
页码：155 / 160
页数：6
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