共 50 条
- [31] Substrate bias effect on amorphous hydrogenated carbon films deposited by filtered cathodic arc deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (11): : 6574 - 6580
- [32] Substrate bias dependence of Raman spectra for TiN films deposited by filtered cathodic vacuum arc Journal of Applied Physics, 2002, 92 (04): : 1845 - 1849
- [35] Control of stress and microstructure in cathodic arc deposited films ISDEIV: XXTH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, PROCEEDINGS, 2002, 20 : 95 - 102