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- [26] CONTEXT-KSVM-PLS BASED RUN-TO-RUN CONTROL FOR NONLINEAR MIMO PROCESSES INTERNATIONAL JOURNAL OF INNOVATIVE COMPUTING INFORMATION AND CONTROL, 2011, 7 (7B): : 4139 - 4148
- [29] Development of Decay Based PLS Model and Its Economic Run-to-Run Control for Semiconductor Processes 2018 ANNUAL AMERICAN CONTROL CONFERENCE (ACC), 2018, : 6469 - 6474
- [30] Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes Science China Information Sciences, 2019, 62