Lifetime improvement of nitrided carbon stripper foils by ion-beam sputtering with a binary gas mixture

被引：7

作者：

Sugai, I

Takeda, Y

Oyaizu, M

Kawakami, H

Hattori, Y

Kawasaki, K

Yoshida, K

Itoh, A

机构：

[1] High Energy Accelerator Res Org, Tsukuba, Ibaraki 3050801, Japan

[2] Tokyo Inst Technol, Tokyo 1528550, Japan

[3] Kyoto Univ, Quantum Sci & Engn Ctr, Kyoto 6110011, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2004年 / 521卷 / 01期

关键词：

carbon stripper foil; heavy ion accelerator; N; stripper lifetime; sputtering;

D O I：

10.1016/j.nima.2003.11.150

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The lifetimes of our carbon stripper foils (10-25 mug/cm(2)) prepared by reactive nitrogen ion-beam sputtering were distributed in a wide range. Expressed in units of integrated beam current received, lifetimes of 750+/-400 mC/cm(2) were usual for a 3.2MeV Ne+ beam. This wide distribution of lifetimes have been improved by applying a binary gas mixture (N-2 + Ne) for sputtering of carbon. With high reproducibility, lifetimes of 475+/-80 mC/cm(2), approximately 15 times those of the best standard commercially available foils, have been achieved. We have also investigated the influence light-element admixtures had on the lifetimes of carbon stripper foils. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：187 / 191

页数：5

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