Optical characterization of MoS2 sputtered thin films

We studied on the crystallinity of as-sputtered and annealed MoS2 thin films by Raman scattering. The samples were prepared by RF magnetron sputtering, and the thermal annealing was carried out under sulfurous atmosphere. Although as-sputtered MoS2 thin films clearly showed the deterioration of the lattice ordering, it was drastically improved by the thermal annealing due to the sulfurization of the sample. And since the sulfurization occurred remarkably on the top surface of MoS2 sputtered thin films, it was expected to be an effective method to realize a few-layer MoS2 sputtered thin films with high crystallinity.