A Novel Multiple-Frequency RF-MEMS Resonator Based on the Whispering Gallery Modes

被引：10
|
作者：
Kan, Xiao [1 ,2 ,3 ]
Chen, Zeji [2 ,3 ]
Yuan, Quan [1 ,2 ,3 ]
Wang, Fengxiang [1 ,2 ,3 ]
Yang, Jinling [1 ,2 ,3 ]
Yang, Fuhua [1 ,2 ,3 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 2019年 / 66卷 / 08期
基金：
中国国家自然科学基金;
关键词：
Microelectromechanical system (MEMS) resonator; quality factor; whispering gallery mode (WGM); DISK RESONATORS;
D O I：
10.1109/TED.2019.2920624
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel microelectromechanical system (MEMS) disk resonator based on the whispering gallery modes (WGMs) has been demonstrated. With the optimized structure of the multi-electrodes, multiple WGMs can be easily excited by a pair of electrodes. For a disk resonator of 37 mu m in radius, resonance frequencies of 56-170 MHz and high-quality factor (Q) around 10 000 in the atmosphere are obtained. In themeantime, a singleWGMcan be realized under a specific electrodes connection. Multiple-frequency outputs from the single resonator could dramatically simplify the communication system and reduce the power consumption of a digital system.
引用
收藏
页码：3683 / 3685
页数：3
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