Semi-insulating GaAs grown in outer space

被引:3
|
作者
Chen, NF
Zhong, XR
Lin, LY
Xie, X
Zhang, M
机构
[1] Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China
[2] CAST, Lanzhou Inst Phys, Lanzhou 625065, Peoples R China
[3] Hebei Inst Semicond, Shijiazhuang 050002, Hebei, Peoples R China
关键词
GaAs; outer space; microgravity; integrated circuit;
D O I
10.1016/S0921-5107(00)00348-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A semi-insulating GaAs single crystal ingot was grown in a recoverable satellite, within a specially designed pyrolytic boron nitride crucible, in a power-traveling furnace under microgravity. The characteristics of a compound semiconductor single crystal depends fundamentally on its stoichiometry, i.e. the ration of two types of atoms in the crystal. a practical technique for nondestructive and quantitative measuring stoichiometry in GaAs single crystal was used to analyze the space-grown GaAs single crystal. The distribution of stoichiometry in a GaAs wafer was measured for the first time. The electrical, optical and structural properties of the space-grown GaAs crystal were studied systematically, Device fabricating experiments prove that the quality of field effect transistors fabricated from direct ion-implantation in semi-insulating GaAs wafers has a close correlation with the crystal's stoichiometry. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:134 / 138
页数:5
相关论文
共 50 条
  • [31] CHARACTERISTICS OF UNDOPED SEMI-INSULATING GaAs CRYSTAL GROWN BY LEC TECHNIQUE.
    Chen, T.P.
    Tzou, J.P.
    Tseng, K.S.
    Nee, C.Y.
    Lin, M.S.
    Huang, T.S.
    1987, 1 (01): : 35 - 40
  • [32] LATTICE BENDING IN LEC-GROWN SEMI-INSULATING GaAs WAFERS.
    Yasuami, Shigeru
    Mikami, Hitoshi
    Hojo, Akimichi
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 1983, 22 (10): : 1567 - 1569
  • [33] DEEP LEVELS IN SEMI-INSULATING LIQUID ENCAPSULATED CZOCHRALSKI-GROWN GAAS
    BURD, MR
    BRAUNSTEIN, R
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1988, 49 (07) : 731 - 735
  • [34] Properties of semi-insulating GaAs:Fe grown by Hydride Vapour Phase Epitaxy
    Messmer, ER
    Söderstrom, D
    Hult, P
    Marcinkevicius, S
    Lourdudoss, S
    Look, DC
    STATE-OF-THE-ART PROGRAM ON COMPOUND SEMICONDUCTORS (SOTAPOCS XXXI), 1999, 99 (17): : 15 - 19
  • [35] Properties of semi-insulating GaAs:Fe grown by hydride vapor phase epitaxy
    Messmer, ER
    Söderström, D
    Hult, P
    Marcinkevicius, S
    Lourdudoss, S
    Look, DC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (08) : 3109 - 3110
  • [36] CHARACTERIZATION OF SEMI-INSULATING GAAS SUBSTRATES FOR GAAS ICS
    NANISHI, Y
    ISHIDA, S
    MIYAZAWA, S
    REVIEW OF THE ELECTRICAL COMMUNICATIONS LABORATORIES, 1985, 33 (01): : 136 - 145
  • [37] EPITAXIAL INAS ON SEMI-INSULATING GAAS SUBSTRATES
    CRONIN, GR
    CONRAD, RW
    BORELLO, SR
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (12) : 1336 - &
  • [38] OBTAINING OHMIC CONTACTS ON SEMI-INSULATING GAAS
    FOMIN, NG
    VOROBEV, YV
    TRETYAK, OV
    PRIBORY I TEKHNIKA EKSPERIMENTA, 1974, (03): : 222 - 223
  • [39] MECHANISM OF SURFACE CONDUCTION IN SEMI-INSULATING GAAS
    CHANG, MF
    LEE, CP
    HOU, LD
    VAHRENKAMP, RP
    KIRKPATRICK, CG
    APPLIED PHYSICS LETTERS, 1984, 44 (09) : 869 - 871
  • [40] EFFECT OF ILLUMINATION ON MOBILITIES IN SEMI-INSULATING GAAS
    THEODOROU, DE
    EUTHYMIOU, PC
    JOURNAL OF APPLIED PHYSICS, 1977, 48 (01) : 427 - 429