Semi-insulating GaAs grown in outer space

被引:3
|
作者
Chen, NF
Zhong, XR
Lin, LY
Xie, X
Zhang, M
机构
[1] Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China
[2] CAST, Lanzhou Inst Phys, Lanzhou 625065, Peoples R China
[3] Hebei Inst Semicond, Shijiazhuang 050002, Hebei, Peoples R China
关键词
GaAs; outer space; microgravity; integrated circuit;
D O I
10.1016/S0921-5107(00)00348-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A semi-insulating GaAs single crystal ingot was grown in a recoverable satellite, within a specially designed pyrolytic boron nitride crucible, in a power-traveling furnace under microgravity. The characteristics of a compound semiconductor single crystal depends fundamentally on its stoichiometry, i.e. the ration of two types of atoms in the crystal. a practical technique for nondestructive and quantitative measuring stoichiometry in GaAs single crystal was used to analyze the space-grown GaAs single crystal. The distribution of stoichiometry in a GaAs wafer was measured for the first time. The electrical, optical and structural properties of the space-grown GaAs crystal were studied systematically, Device fabricating experiments prove that the quality of field effect transistors fabricated from direct ion-implantation in semi-insulating GaAs wafers has a close correlation with the crystal's stoichiometry. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:134 / 138
页数:5
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