Characterization of a 3D-MEMS Piezoelectric Transducer for Portable Imaging Systems

被引：4

作者：

Nistorica, C. ^{[1
]}

Latev, D. ^{[1
]}

Gardner, D. ^{[1
]}

Imai, D. ^{[1
]}

Daft, C. ^{[2
]}

机构：

[1] FUJIFILM Dimatix Inc, Santa Clara, CA 95050 USA

[2] River Son Solut, Dublin, CA 94568 USA

来源：

2015 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2015年

关键词：

PMUT; MEMS; 3D; Dome; PZNT; HIFU; INTRACARDIAC ECHO CARDIOGRAPHY; REAL-TIME; 2-D ARRAY; CATHETER;

D O I：

10.1109/ULTSYM.2015.0373

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the characterization of two ultrasound transducers that were developed for two different applications. Both transducer arrays are based on a high performance PZNT film integrated in a 3D dome shaped structure, which forms the basic resonator cell of the transducer. The first transducer having wide bandwidth and low operating voltage of 20V can be implemented in a portable type of ultrasound system. The second transducer having high sensitivity, low operating voltage and a very small form factor can be implemented in miniaturized ultrasound catheters. Inter-element cross talk of less than -35dB was measured. Images of a wire target phantom were acquired using a phased array algorithm demonstrating high resolution axially and laterally.

引用

页数：4

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