Characterization of a 3D-MEMS Piezoelectric Transducer for Portable Imaging Systems

This paper presents the characterization of two ultrasound transducers that were developed for two different applications. Both transducer arrays are based on a high performance PZNT film integrated in a 3D dome shaped structure, which forms the basic resonator cell of the transducer. The first transducer having wide bandwidth and low operating voltage of 20V can be implemented in a portable type of ultrasound system. The second transducer having high sensitivity, low operating voltage and a very small form factor can be implemented in miniaturized ultrasound catheters. Inter-element cross talk of less than -35dB was measured. Images of a wire target phantom were acquired using a phased array algorithm demonstrating high resolution axially and laterally.