MEMS applications using diamond thin films

被引：0
|
作者：
Huff, MA
Aidala, DA
Butler, JE
机构：
[1] MEMS & Nanotechnol Exchange, Reston, VA 20191 USA
[2] sp3 Diamond Technol Inc, Santa Clara, CA USA
[3] USN, Res Lab, Washington, DC 20375 USA
来源：
SOLID STATE TECHNOLOGY | 2006年 / 49卷 / 04期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Diamond thin film offers advantages over silicon and other thin-film materials used in micro- and nanofabrication. The technology for depositing high-quality diamond thin films over large-area substrates has only recently become available and is being used for a number of applications, including MEMS devices.
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页码：45 / +
页数：3
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