Spin-on hybrid dielectric for LCD and OLED displays

被引:0
|
作者
Krishnamoorthy, Ahila [1 ]
Spear, Richard [1 ]
Gebrebrhan, Amanuel [1 ]
Stifanos, Mehari [1 ]
Bien, Hai [1 ]
Lowe, Marie [2 ]
Yellowaga, Deborah [2 ]
Smith, Peter [3 ]
机构
[1] Honeywell Elect Mat, 1349 Moffett Pk Dr, Sunnyvale, CA 94089 USA
[2] Honeywell Elect Mat, Chandler, AZ 85226 USA
[3] Honeywell Specialty Mat, Morristown, NJ 07962 USA
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Organosiloxane based spin on planarizing dielectric was developed for application in flat panel displays as a replacement to conformal chemical vapor deposited SiNx. Here we demonstrate the successful use of siloxane-based material as a color filter overcoat (CFOC) on color filter screens, thin film transistor (TFT) passivation layer between liquid crystal (LC) or organic light emitting diode (OLED) layer and TFT regions, gate dielectric between the gate and the source/drain regions, interlayer dielectric (ILD), encapsulating layer for organic light emitting diode (OLED) displays and substrate planarization.
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页码:2049 / +
页数:2
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