Fast analytical design of MEMS capacitive pressure sensors with sealed cavities

被引：17

作者：

Rochus, V. ^{[1
]}

Wang, B. ^{[1
]}

Tilmans, H. A. C. ^{[1
]}

Chaudhuri, A. Ray ^{[1
]}

Helin, P. ^{[1
]}

Severi, S. ^{[1
]}

Rottenberg, X. ^{[1
]}

机构：

[1] IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium

来源：

MECHATRONICS | 2016年 / 40卷

关键词：

Capacitive pressure sensor; MEMS; Analytical expression; Sealed cavities;

D O I：

10.1016/j.mechatronics.2016.05.012

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents a fast design strategy for MEMS capacitive pressure sensors with sealed cavities. Based on circular Kirchhoff-Love plate theory and the perfect gas law, the underlying analytical model allows for a rapid and accurate evaluation of the sensitivity of the sensors, crucial for improving their design in function of the reference pressure applied in the sealed cavities. The accuracy of the new model is demonstrated by comparing its predictions with more computationally expensive simulation techniques (high-order parametric element and three-dimensional finite element models) and with experimental measurements performed on a 300 pm diameter membrane fabricated using the Poly-SiGe platform developed at imec. (C) 2016 Elsevier Ltd. All rights reserved.

引用

页码：244 / 250

页数：7

共 50 条

[31] Material selection for optimum design of MEMS pressure sensors
Mehmood, Zahid
Haneef, Ibraheem
Udrea, Florin
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2020, 26 (09): : 2751 - 2766
[32] Material selection for optimum design of MEMS pressure sensors
Zahid Mehmood
Ibraheem Haneef
Florin Udrea
Microsystem Technologies, 2020, 26 : 2751 - 2766
[33] Design, fabrication, and characterization of a readout integrated circuit (ROIC) for capacitive MEMS sensors
Lee, MyungLae
Lee, SungSik
Jung, SungHae
Je, ChangHan
Hwang, Gunn
Choi, ChangAuck
2007 IEEE SENSORS, VOLS 1-3, 2007, : 260 - 263
[34] MEMS pressure sensors
VTI Technologies, Finland
Electron World, 2007, 1857 (28-30): : 28 - 30
[35] Mems pressure sensors
Timonen, Heikki
ELECTRONICS WORLD, 2007, 113 (1857): : 28 - 31
[36] Design and simulation of MEMS based capacitive pressure sensor for harsh environment
K. Srinivasa Rao
B. Mohitha reddy
V. Bala Teja
G. V. S. Krishnateja
P. Ashok Kumar
K. S. Ramesh
Microsystem Technologies, 2020, 26 : 1875 - 1880
[37] Design and Analysis of High Performance MEMS Capacitive Pressure Sensor for TPMS
Sharma, Anil
Singh, Jawar
2013 INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION, ROBOTICS AND EMBEDDED SYSTEMS (CARE-2013), 2013,
[38] Modeling and Simulation of MEMS Capacitive Displacement Sensors
Ziko, Mehadi Hasan
Ghouri, M. Siraj
Koel, Ants
2020 IEEE 15TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEM (IEEE NEMS 2020), 2020, : 171 - 175
[39] Design and Analysis of a Touch Mode MEMS Capacitive Pressure Sensor for IUPC
Sharma, Anil
2015 19TH INTERNATIONAL SYMPOSIUM ON VLSI DESIGN AND TEST (VDAT), 2015,
[40] Design and thermal analysis of high performance MEMS capacitive pressure sensor
Lü H.-J.
Hu G.-Q.
Zou W.
Wu C.-Y.
Chen Y.-F.
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2010, 18 (05): : 1166 - 1174

← 1 2 3 4 5 →