Fast analytical design of MEMS capacitive pressure sensors with sealed cavities

被引：17

作者：

Rochus, V. ^{[1
]}

Wang, B. ^{[1
]}

Tilmans, H. A. C. ^{[1
]}

Chaudhuri, A. Ray ^{[1
]}

Helin, P. ^{[1
]}

Severi, S. ^{[1
]}

Rottenberg, X. ^{[1
]}

机构：

[1] IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium

来源：

MECHATRONICS | 2016年 / 40卷

关键词：

Capacitive pressure sensor; MEMS; Analytical expression; Sealed cavities;

D O I：

10.1016/j.mechatronics.2016.05.012

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents a fast design strategy for MEMS capacitive pressure sensors with sealed cavities. Based on circular Kirchhoff-Love plate theory and the perfect gas law, the underlying analytical model allows for a rapid and accurate evaluation of the sensitivity of the sensors, crucial for improving their design in function of the reference pressure applied in the sealed cavities. The accuracy of the new model is demonstrated by comparing its predictions with more computationally expensive simulation techniques (high-order parametric element and three-dimensional finite element models) and with experimental measurements performed on a 300 pm diameter membrane fabricated using the Poly-SiGe platform developed at imec. (C) 2016 Elsevier Ltd. All rights reserved.

引用

页码：244 / 250

页数：7

共 50 条

[1] Fast Analytical Design of Poly-SiGe MEMS Pressure Sensors
Rochus, V.
Wang, B.
Chaudhuri, A. Ray
Helin, P.
Severi, S.
Rottenberg, X.
2015 16TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2015,
[2] Batch-processed vacuum-sealed capacitive pressure sensors
Chavan, AV
Wise, KD
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2001, 10 (04) : 580 - 588
[3] Capacitive Pressure Sensors Based on MEMS, Operating in Harsh Environments
Hezarjaribi, Y.
Hamidon, M. N.
Keshmiri, S. H.
Bahadorimehr, A. R.
ICSE: 2008 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2008, : 184 - +
[4] Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors
Wan, Yuanjie
Li, Zhiwei
Huang, Zile
Hu, Baofa
Lv, Wenlong
Zhang, Chunquan
San, Haisheng
Zhang, Shaoda
MICROMACHINES, 2022, 13 (05)
[5] Analytical Model of Micropyramidal Capacitive Pressure Sensors and Machine-Learning-Assisted Design
Ma, Chao
Li, Gang
Qin, Longhui
Huang, Weicheng
Zhang, Hongrui
Liu, Wenfeng
Dong, Tianyu
Li, Sheng-Tao
ADVANCED MATERIALS TECHNOLOGIES, 2021, 6 (12)
[6] Characterization of CMOS MEMS Capacitive Ultrasonic Sensors for Fast Photoacoustic Imaging
Kuo, Chin-An
Lu, Michael S. -C.
28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014, 87 : 1119 - 1122
[7] Study of Materials For the Design of MEMS Capacitive Pressure Sensor
Jindal, Sumit Kumar
Raghuwanshi, Sanjeev Kumar
2ND INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES: MICRO TO NANO 2015 (ETMN-2015), 2016, 1724
[8] Prototype MEMS capacitive pressure sensor design and manufacturing
Kárpáti, Tamás
Pap, Andrea Edit
Kulinyi, Sándor
Periodica polytechnica Electrical engineering and computer science, 2013, 57 (01): : 3 - 7
[9] Design, Simulation and Analysis of MEMS Capacitive Pressure Sensor
See, Y. J.
Ismail, Mohd H.
19TH IEEE STUDENT CONFERENCE ON RESEARCH AND DEVELOPMENT (SCORED 2021), 2021, : 262 - 266
[10] TEMPERATURE COMPENSATION IN MEMS CAPACITIVE PRESSURE SENSORS FOR HARSH ENVIRONMENT APPLICATIONS
Suthar, Rahul Jitendrab
Shavezipur, Mohammad
PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2018, VOL 4, 2018,

← 1 2 3 4 5 →