Structural and Stoichiometry Change in NiO with a Thin IrO2 Layer

被引:2
|
作者
Kim, C. [1 ,2 ]
Cho, E. [1 ,2 ]
Yoon, S. [1 ,2 ]
Kim, D. [3 ]
Jung, R. [3 ]
Lee, J. [3 ]
Seo, S. [3 ]
Cheong, H. [4 ]
Bastjan, M. [5 ]
Schulz, B. [5 ]
Ruebhausen, M. [5 ]
机构
[1] Ewha Womans Univ, Dept Phys, Seoul 120750, South Korea
[2] Ewha Womans Univ, Div Nano Sci, Seoul 120750, South Korea
[3] Samsung Adv Inst Technol, Suwon 440600, South Korea
[4] Sogang Univ, Dept Phys, Seoul 120750, South Korea
[5] Univ Hamburg, Inst Angew Phys, D-20355 Hamburg, Germany
关键词
NiO; RRAM; Raman scattering;
D O I
10.3938/jkps.53.3390
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
An IrO2 layer has been proposed as the material for minimizing dispersion of several memory switching parameters of resistance-change random access memory devices using NiO. We present Raman scattering and ellipsometry measurements on NiO films with and without an IrO2 layer. Our Raman measurements on the NiO films show that the addition of an IrO2 layer enhances the local crystalline quality, which is completely consistent with previous results. Moreover, we found an IrO2 layer to be associated with the changing stoichiometry in the NiO film. This can also be related to an abrupt change in the optical transition near 2.7 eV with IrO2, which is known to reflect the NiO stoichiometry.
引用
收藏
页码:3390 / 3393
页数:4
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