In-situ TEM mechanical characterization of nanowire in atomic scale using MEMS device

This paper presents an experimental method for atomic-scale observation of in situ transmission electron microscopy (TEM) tensile test using micro-electromechanical systems (MEMS) actuator. A carefully designed and fabricated thermal actuator was applied in a standard double-tilt TEM holder to provide precisely controllable stretching process. To demonstrate the capabilities of the tensile testing system, some copper nanowires were stretched under a slowly force loading and in situ atomic resolution images were achieved. In addition, some faults releasing processes were observed during the tensile stretching and the corresponding strain-stress curve was calculated. The implemented actuator for atomic-scale observation can potentially have broad application to studies of nanoscale materials.