In-situ TEM mechanical characterization of nanowire in atomic scale using MEMS device

被引：2
|
作者：
Zhang, Xiao [1 ,2 ]
Yang, Yang [1 ,2 ]
Xu, Fangfang [3 ]
Li, Tie [1 ]
Wang, Yuelin [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Ceram, Anal Testing Ctr Inorgan Mat, Shanghai, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2018年 / 24卷 / 04期
基金：
中国国家自然科学基金;
关键词：
TRANSMISSION ELECTRON-MICROSCOPY; COPPER;
D O I：
10.1007/s00542-017-3601-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents an experimental method for atomic-scale observation of in situ transmission electron microscopy (TEM) tensile test using micro-electromechanical systems (MEMS) actuator. A carefully designed and fabricated thermal actuator was applied in a standard double-tilt TEM holder to provide precisely controllable stretching process. To demonstrate the capabilities of the tensile testing system, some copper nanowires were stretched under a slowly force loading and in situ atomic resolution images were achieved. In addition, some faults releasing processes were observed during the tensile stretching and the corresponding strain-stress curve was calculated. The implemented actuator for atomic-scale observation can potentially have broad application to studies of nanoscale materials.
引用
收藏
页码：2045 / 2049
页数：5
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