Cross-Coupled Repetitive Control of an XY Compliant Nanornanipulator

This paper proposes a high precision contour tracking strategy for an KY nanornanipulator. Specifically the proposed control method includes a repetitive controller (RC) to achieve periodic trajectory tracking for each axis, and a cross -coupled control (CCC) for the improvement of the contouring precision, It is shown that the appropriate feedback position of the axial contour error to the RC is crucial to the improvement of the contouring precision. Various simulation and experimental comparative results validate the capability of the proposed control strategy to achieve high precision contouring performance.