Multifractal spectra of spatial distributions of energies dissipated from incident electrons in solids

As a beam of electrons is normally incident into a solid, the energies of incident electrons dissipate along primary and secondary electron trajectories in the solid. The spatial distributions of dissipation sites and energies dissipated at these sites in solid are nonuniform and can be described as being multifractal. These spatial distributions from beams of 1-10 keV incident electrons in Si, Cu, Ag, and Au have been obtained by the Monte Carlo method. The box-counting method has been used to calculate the multifractal spectra. The results show that these spatial distributions can be described quantitatively by some multifractal parameters and multifractal spectra.