Impact of multi-layer deposition method on defects for EUVL photomask blanks

被引：0

作者：

Cullins, Jerry ^{[1
]}

Motai, Kumi ^{[1
]}

Nisiyama, Iwao ^{[1
]}

机构：

[1] Assoc Super Adv Elect Technol, NTT Atsugi R&D, Morinosato Wakamiya 3-1, Atsugi, Kanagawa 2430198, Japan

来源：

EMERGING LITHOGRAPHIC TECHNOLOGIES X, PTS 1 AND 2 | 2006年 / 6151卷

关键词：

mask; photomask; multi-layer deposition; defects; ion beam; magnetron;

D O I：

10.1117/12.656931

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper is a summary of the work to date done by the ASET consortia to look at the impact of deposition method on defects. The study includes scratch and bump type defects coated with EUVL quality multi-layers using Magnetron Sputtering, Ion Beam Sputtering, or Ion Beam Sputtering with a secondary ion etch. After the deposition TEM samples were taken of the individual defects and the impact of the deposition method on the multi-layers was examined.

引用

页码：U1028 / U1036

页数：9

共 50 条

[41] General method to digitalize multi-layer woven structure
Sun, Fangfang
Zhou, Haili
Gu, Lijun
Han, Chenchen
Huang, Jian
Li, Chao
Zhang, Liquan
Zhao, Qian
JOURNAL OF THE TEXTILE INSTITUTE, 2024, 115 (07) : 1039 - 1047
[42] Tin deposition on ruthenium and its influence on blistering in multi-layer mirrors
Onwudinanti, Chidozie
Brocks, Geert
Koelman, Vianney
Morgan, Thomas
Tao, Shuxia
PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2021, 23 (25) : 13878 - 13884
[43] Vacuum are deposition of TiN, NbN and TiN/NbN multi-layer coatings
Zhitomirsky, VN
Grimberg, I
Rapoport, L
Travitzky, NA
Boxman, RL
Goldsmith, S
Weiss, BZ
SURFACE & COATINGS TECHNOLOGY, 1999, 120 : 219 - 225
[44] Simulating the Impact of Multi-Layer Fabric Targets using a Multi-Scale Model and the Finite Element Method
Nilakantan, G.
Keefe, M.
Gillespie, J. W., Jr.
Bogetti, T. A.
RECENT ADVANCES IN TEXTILE COMPOSITES, 2008, : 506 - +
[45] Orderly deposition of multi-layer nanofibrous membrane by electrohydrodynamic direct writing
Zheng, Gaofeng
Zhu, Ping
Jiang, Jiaxin
Zhong, Weizheng
Zheng, Jianyi
Liu, Juan
Wang, Xiang
Li, Wenwang
Guo, Shumin
MICRO & NANO LETTERS, 2019, 14 (04) : 458 - 461
[46] Multi-layer graphene on Co(0001) by ethanol chemical vapor deposition
Kazi, H.
Cao, Y.
Tanabe, I.
Driver, M. S.
Dowben, P. A.
Kelber, J. A.
MATERIALS RESEARCH EXPRESS, 2014, 1 (03):
[47] Multi-layer Perceptron Diagnosis Method of Strip Surface Defects Based on Biogeography-Based Optimization Algorithm
Hou, Jia-Ning
Wang, Jie-Sheng
Liu, Yu
IAENG International Journal of Computer Science, 2024, 51 (01) : 13 - 22
[48] A Method for Characterizing Defects in Multi-Layer Conductive Structures by Combining Pulsed Eddy Current Signals with PCA Components
Ding, Tianyu
Yang, Zhaohe
Huang, Hua
Huang, Pingjie
Hou, Dibo
Zhang, Guangxin
45TH ANNUAL REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOL 38, 2019, 2102
[49] Pulsed laser deposition, in-situ process modeling and feedback control for multi-layer deposition
Laube, SJP
Voevodin, AA
SURFACE & COATINGS TECHNOLOGY, 1998, 99 (1-2): : 14 - 19
[50] Pulsed laser deposition, in-situ process modeling and feedback control for multi-layer deposition
Laube, S.J.P.
Voevodin, A.A.
Surface and Coatings Technology, 1998, 99 (1-2): : 14 - 19

← 1 2 3 4 5 →