Optimal design of tilt carrier frequency computer-generated holograms to measure aspherics

被引:11
|
作者
Peng, Jiantao [1 ,2 ]
Chen, Zhe [1 ,2 ]
Zhang, Xingxiang [1 ]
Fu, Tianjiao [1 ,2 ]
Ren, Jianyue [1 ]
机构
[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
关键词
DISTURBING DIFFRACTION ORDERS; OPTICAL-ELEMENTS; ERRORS;
D O I
10.1364/AO.54.007433
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Computer-generated holograms (CGHs) provide an approach to high-precision metrology of aspherics. A CGH is designed under the trade-off among size, mapping distortion, and line spacing. This paper describes an optimal design method based on the parametric model for tilt carrier frequency CGHs placed outside the interferometer focus points. Under the condition of retaining an admissible size and a tolerable mapping distortion, the optimal design method has two advantages: (1) separating the parasitic diffraction orders to improve the contrast of the interferograms and (2) achieving the largest line spacing to minimize sensitivity to fabrication errors. This optimal design method is applicable to common concave aspherical surfaces and illustrated with CGH design examples. (C) 2015 Optical Society of America
引用
收藏
页码:7433 / 7441
页数:9
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