Mid-infrared integrated photonics on silicon: a perspective

被引:328
|
作者
Lin, Hongtao [1 ,2 ]
Luo, Zhengqian [1 ,3 ]
Gu, Tian [2 ]
Kimerling, Lionel C. [1 ,2 ]
Wada, Kazumi [1 ,2 ]
Agarwal, Anu [2 ]
Hu, Juejun [1 ,2 ]
机构
[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
[2] MIT, Mat Proc Ctr, Cambridge, MA 02139 USA
[3] Xiamen Univ, Dept Elect Engn, Xiamen 361005, Peoples R China
基金
美国国家科学基金会; 中国国家自然科学基金;
关键词
mid-IR; integrated photonics; silicon photonics; spectrometer; optical sensor; SUBWAVELENGTH GRATING COUPLER; NONLINEAR-OPTICAL RESPONSE; FREQUENCY COMB GENERATION; CHALCOGENIDE WAVE-GUIDES; QUANTUM CASCADE LASERS; GE-ON-SI; MU-M; BROAD-BAND; SUPERCONTINUUM GENERATION; SINGLE-MODE;
D O I
10.1515/nanoph-2017-0085
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The emergence of silicon photonics over the past two decades has established silicon as a preferred substrate platform for photonic integration. While most silicon-based photonic components have so far been realized in the near-infrared (near-IR) telecommunication bands, the mid-infrared (mid-IR, 2-20-mu m wavelength) band presents a significant growth opportunity for integrated photonics. In this review, we offer our perspective on the burgeoning field of mid-IR integrated photonics on silicon. A comprehensive survey on the state-of-the-art of key photonic devices such as waveguides, light sources, modulators, and detectors is presented. Furthermore, on-chip spectroscopic chemical sensing is quantitatively analyzed as an example of mid-IR photonic system integration based on these basic building blocks, and the constituent component choices are discussed and contrasted in the context of system performance and integration technologies.
引用
收藏
页码:393 / 420
页数:28
相关论文
共 50 条
  • [21] Wafer-Fusion-Enabled Platforms for Mid-Infrared Integrated Silicon Photonics
    Chiles, Jeff
    Khan, Saeed
    Fathpour, Sasan
    2014 IEEE PHOTONICS SOCIETY SUMMER TOPICAL MEETING SERIES, 2014, : 47 - 48
  • [22] Low Loss Germanium-on-Silicon waveguides for integrated Mid-infrared Photonics
    Millar, R. W.
    Gallacher, K.
    Griskeviciute, U.
    Baldassarre, L.
    Sorel, M.
    Ortolani, M.
    Paul, D. J.
    SILICON PHOTONICS XIV, 2019, 10923
  • [23] Mid-Infrared Photonics
    Soref, Richard
    2015 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2015,
  • [24] Silicon Photonics in the Mid-Infrared: Waveguide Absorption Sensors
    Lavchiev, Ventsislav M.
    Jakoby, Bernhard
    Ritchie, Grant
    Kirkbride, James
    Hedenig, Ursula
    Grille, Thomas
    Irsigler, Peter
    Lendl, Bernhard
    2014 IEEE SENSORS, 2014,
  • [25] Germanium Mid-infrared Integrated Photonics on GeOI Platform
    Takenaka, Mitsuru
    Zhao, Ziqiang
    Ho, Chong Pei
    Fujigaki, Takumi
    Toprasertpong, Kasidit
    Takagi, Shinichi
    2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2021,
  • [26] Ferroelectric Barium Titanate for Mid-Infrared Integrated Photonics
    Jin, Tiening
    Li, Leigang
    Wang, Haiyan
    Pao Tai Lin
    2017 IEEE 17TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2017, : 569 - 571
  • [27] Mid-infrared integrated waveguide modulators based on silicon-on-lithium-niobate photonics
    Chiles, Jeff
    Fathpour, Sasan
    OPTICA, 2014, 1 (05): : 350 - 355
  • [28] Mid-Infrared (Mid-IR) Silicon-Based Photonics
    Fedeli, Jean-Marc
    Nicoletti, Sergio
    PROCEEDINGS OF THE IEEE, 2018, 106 (12) : 2302 - 2312
  • [29] Ultrafast Silicon Photonics with Visible to Mid-Infrared Pumping of Silicon Nanocrystals
    Diroll, Benjamin T.
    Schramke, Katelyn S.
    Guo, Peijun
    Kortshagen, Uwe R.
    Schaller, Richard D.
    NANO LETTERS, 2017, 17 (10) : 6409 - 6414
  • [30] Monolithic Integration of InSb Photodetector on Silicon for Mid-Infrared Silicon Photonics
    Jia, Bo Wen
    Tan, Kian Hua
    Loke, Wan Khai
    Wicaksono, Satrio
    Lee, Kwang Hong
    Yoon, Soon Fatt
    ACS PHOTONICS, 2018, 5 (04): : 1512 - +