The ultimate detection limits of electron energy-loss spectroscopy

被引：0
|
作者：
Natusch, MKH [1 ]
Botton, GA [1 ]
Humphreys, CJ [1 ]
Krivanek, OL [1 ]
机构：
[1] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
来源：
ELECTRON | 1998年
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
We develop the methodology to predict spectral signal-to-noise ratios (SNRs) of electron energy-loss spectroscopy (EELS) by computing spectra taking account of valence electron excitations, inner-shell excitations and elastic scattering together with the noise characteristics of the detection system. The consideration of multiple scattering in our model allows us to apply it to a wide range of specimen thicknesses and collection angles. The detectability of an element is judged by the SNR. The calculated SNRs at the oxygen and magnesium K-edges in MgO agree well with experiment.
引用
收藏
页码：476 / 483
页数：4
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