Determination of Parameters of Thin Semiconductor Layers by means of One-dimensional Microwave Photonic Crystals

被引：0

作者：

Ponomarev, D. V. ^{[1
]}

Nikitov, S. A. ^{[1
]}

Usanov, D. A. ^{[1
]}

Skripal, A. V. ^{[1
]}

Postelga, A. E. ^{[1
]}

机构：

[1] Saratov NG Chernyshevskii State Univ, Dept Solid State Phys, Lab Metamat, Astrahanskaya Str 83, Saratov 410012, Russia

来源：

2012 19th International Conference on Microwave Radar and Wireless Communications (MIKON), Vols 1 and 2 | 2012年

关键词：

Microwave photonic crystal; measurement; electrical conductivity; thickness; semiconductor layer;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The possibility to simultaneously determine the thickness and the electrical conductivity of thin semiconductor layer, which play a role of the irregularity in one-dimensional waveguide photonic crystals, using the results of measurement of reflection and transmission spectra in microwave band has been shown. The results of computer modeling and the inverse problem solving are presented.

引用

页码：789 / 793

页数：5

共 50 条

[1] Determination of Parameters of Thin Semiconductor Layers on the Basis of One-Dimensional Microwave Photon Crystals
Gulyaev, Yu. V.
Nikitov, S. A.
Usanov, D. A.
Skripal, A. V.
Postel'ga, A. E.
Ponomarev, D. V.
DOKLADY PHYSICS, 2012, 57 (04) : 145 - 147
[2] Determination of parameters of thin semiconductor layers on the basis of one-dimensional microwave photon crystals
Yu. V. Gulyaev
S. A. Nikitov
D. A. Usanov
A. V. Skripal’
A. E. Postel’ga
D. V. Ponomarev
Doklady Physics, 2012, 57 : 145 - 147
[3] Application of one-dimensional microwave photonic crystals for measurements of parameters of structures based on thin semiconductor layers
Usanov, Dmitry A.
Nikitov, Sergey A.
Skripal, Alexander V.
Ponomarev, Denis V.
2012 PROCEEDINGS OF THE INTERNATIONAL CONFERENCE DAYS ON DIFFRACTION (DD), 2012, : 229 - 233
[4] Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals
S. A. Nikitov
Yu. V. Gulyaev
D. A. Usanov
A. V. Skripal’
D. V. Ponomarev
Doklady Physics, 2013, 58 : 6 - 8
[5] Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals
Nikitov, S. A.
Gulyaev, Yu. V.
Usanov, D. A.
Skripal', A. V.
Ponomarev, D. V.
DOKLADY PHYSICS, 2013, 58 (01) : 6 - 8
[6] Multiparametric measurements of epitaxial semiconductor structures with the use of one-dimensional microwave photonic crystals
D. A. Usanov
S. A. Nikitov
A. V. Skripal’
D. V. Ponomarev
E. V. Latysheva
Journal of Communications Technology and Electronics, 2016, 61 : 42 - 49
[7] Multiparametric measurements of epitaxial semiconductor structures with the use of one-dimensional microwave photonic crystals
Usanov, D. A.
Nikitov, S. A.
Skripal', A. V.
Ponomarev, D. V.
Latysheva, E. V.
JOURNAL OF COMMUNICATIONS TECHNOLOGY AND ELECTRONICS, 2016, 61 (01) : 42 - 49
[8] Microwave Photonic Structures and Their Application for Measurements of Parameters of Thin Semiconductor Layers
Usanov, D. A.
Skripal, A. V.
Ponomarev, D. V.
Latysheva, E. V.
Nikitov, S. A.
2014 44TH EUROPEAN MICROWAVE CONFERENCE (EUMC), 2014, : 984 - 987
[9] Fano Resonance by Means of the One-Dimensional Superconductor Photonic Crystals
Aly, Arafa H.
Mohamed, Doaa
Elsayed, Hussein A.
Mehaney, Ahmed
JOURNAL OF SUPERCONDUCTIVITY AND NOVEL MAGNETISM, 2018, 31 (12) : 3827 - 3833
[10] Fano Resonance by Means of the One-Dimensional Superconductor Photonic Crystals
Arafa H. Aly
Doaa Mohamed
Hussein A. Elsayed
Ahmed Mehaney
Journal of Superconductivity and Novel Magnetism, 2018, 31 : 3827 - 3833

← 1 2 3 4 5 →