共 50 条
- [21] Wafer bonding and smartcut for formation of silicon-on-insulator materials International Conference on Solid-State and Integrated Circuit Technology Proceedings, 1998, : 745 - 748
- [22] Silicon-On-Insulator (SOI) wafer fabrication for MEMS applications SMART MATERIALS, STRUCTURES, AND SYSTEM, PTS 1 AND 2, 2003, 5062 : 840 - 845
- [25] Ultrathin Silicon-on-Insulator (SOI) wafer for compliant substrate 2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2017, : 858 - 860
- [26] VLS growth of silicon whiskers on a patterned silicon-on-insulator (SOI) wafer J Cryst Growth, 1-2 (37-41):