Design and simulation of a digital optoelectronic switch on silicon-on-insulator wafer

被引：0

作者：

Tsao, SL ^{[1
]}

Tine, ZH ^{[1
]}

机构：

[1] Yuan Ze Univ, Dept Elect Engn, Chang Li, Taiwan

来源：

DESIGN, MANUFACTURING, AND TESTING OF PLANAR OPTICAL WAVEGUIDE DEVICES | 2001年 / 4439卷

关键词：

optoelectronic; switch; silicon-on-insulator; optical waveguide; beam progation method;

D O I：

10.1117/12.447627

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, we propose a novel digital silicon-on-insulator (SOI) optical waveguide switch. Adding electrodes on a symmetric vertically coupling SOI switch, the device we can change light direction and coupling coefficient based on the plasma dispersion effect. The novel device is operated at wavelength 1550nm. Beam propagation method simulations show good output mode pattern.

引用

页码：1 / 9

页数：9

共 50 条

[1] SILICON-ON-INSULATOR BY WAFER BONDING - A REVIEW
MASZARA, WP
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (01) : 341 - 347
[2] WAFER BONDING FOR SILICON-ON-INSULATOR TECHNOLOGIES
LASKY, JB
APPLIED PHYSICS LETTERS, 1986, 48 (01) : 78 - 80
[3] Optoelectronic integration in silicon-on-insulator technologies
Boussey, J
Chouteau, S
CAS'98 PROCEEDINGS - 1998 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 21ST EDITION, VOLS 1 AND 2, 1998, : 407 - 415
[4] Design of a compact multimode interference optical switch in silicon-on-insulator
Wang, Zhang-Tao
Yu, Jin-Zhong
Guangdianzi Jiguang/Journal of Optoelectronics Laser, 2003, 14 (09): : 897 - 900
[5] Reflective Optical Switch in Silicon-on-Insulator
Owens, N. P.
Mashanovich, G. Z.
Reed, G. T.
PS: 2009 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING, 2009, : 98 - 99
[6] WAFER BONDING TECHNIQUE FOR SILICON-ON-INSULATOR TECHNOLOGY
ABE, T
MATLOCK, JH
SOLID STATE TECHNOLOGY, 1990, 33 (11) : 39 - 40
[7] Process for extremely thin silicon-on-insulator wafer
Usenko, AY
Carr, WN
Chen, B
NANOTECH 2003, VOL 1, 2003, : 546 - 549
[8] SILICON-WAFER BONDING MECHANISM FOR SILICON-ON-INSULATOR STRUCTURES
ABE, T
TAKEI, T
UCHIYAMA, A
YOSHIZAWA, K
NAKAZATO, Y
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (12): : L2311 - L2314
[9] Wafer bonding of diamond films to silicon for silicon-on-insulator technology
Yushin, GN
Wolter, SD
Kvit, AV
Collazo, R
Prater, JT
Stoner, BR
Sitar, Z
MATERIALS ISSUES IN NOVEL SI-BASED TECHNOLOGY, 2002, 686 : 69 - 74
[10] Submicrosecond submilliwatt silicon-on-insulator thermooptic switch
Geis, MW
Spector, SJ
Williamson, RC
Lyszczarz, TM
IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (11) : 2514 - 2516

← 1 2 3 4 5 →