Structure and mechanical properties of W-Se-C/diamond-like carbon and W-Se/diamond-like carbon bi-layer coatings prepared by pulsed laser deposition

被引:53
|
作者
Fominski, V. Yu. [1 ]
Grigoriev, S. N. [2 ]
Celis, J. P. [3 ]
Romanov, R. I. [1 ]
Oshurko, V. B. [2 ]
机构
[1] Natl Res Nucl Univ MEPhI, Moscow 115409, Russia
[2] Moscow State Univ Technol STANKIN, Moscow 127994, Russia
[3] Katholieke Univ Leuven, Dept Met & Toegepaste Mat MTM, B-3001 Louvain, Belgium
关键词
Pulsed laser deposition; Shadow-mask; Bi-layer films; Diamond-like carbon; Tungsten-selenium-carbon; Nanostructures; Chemical state; Mechanical properties; WEAR-RESISTANT COATINGS; BUFFER GAS ATMOSPHERE; TRIBOLOGICAL PROPERTIES; THIN-FILMS; C COATINGS; AMORPHOUS-CARBON; PERFORMANCE; BEHAVIOR; VACUUM; PLUME;
D O I
10.1016/j.tsf.2012.06.085
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Bi-layer W-Se-C/diamond-like carbon (DLC) and WSex/DLC coatings were obtained by standard and shadow-masked pulsed laser co-deposition from WSe2 and graphite targets. W-Se-C coatings appeared as nanocomposites containing quasi-amorphous WSe2, WC, spherical beta-W nanocrystalline particles encapsulated in WSe2 amorphous shell, and amorphous carbon phases. In WSex/DLC coatings, the formation of chemical bonds between W and C atoms was noticed at the interface. An increase of the C concentration over 40 at.% increases hardness and elasticity (up to 2 times at similar to 60 at.%C), and the Se/W ratio was always close to 1.4. The use of shadow-masked configuration avoids the deposition of micro-and nanoparticles. However, this method leads to a substantial increase of the Se content (Se/W >= 4), and the coatings became softer. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:6476 / 6483
页数:8
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