Infrared frequency selective surfaces fabricated using optical lithography and phase-shift masks

A frequency selective surface (FSS) structure has been fabricated for use in a thermophotovoltaic system. The FSS provides a means for reflecting the unusable light below the band gap of the thermophotovoltaic cell while transmitting the usable light above the band gap. This behavior is relatively independent of the light's incident angle. The fabrication of the FSS was done using optical lithography and a phase-shift mask. The FSS cell consisted of circular slits spaced by 1100 nm. The diameter and width of the circular slits were 870 and 120 nm, respectively. The FSS was predicted to pass wavelengths near 7 Am and reflect wavelengths outside of this pass band. The FSSs fabricated performed as expected with a pass band centered near 5 mum. (C) 2001 American Vacuum Society.