Experimental study of Fourier transform spectrometer based on MEMS micro-mirror

被引：9
|
作者：
Chen, Jianjun [1 ]
Zhu, Yong [1 ]
Liu, Bo [1 ]
Wei, Wei [1 ]
Wang, Ning [1 ]
Zhang, Jie [1 ]
机构：
[1] Chongqing Univ, Coll Optoelect Engn, Chongqing 400030, Peoples R China
来源：
CHINESE OPTICS LETTERS | 2013年 / 11卷 / 05期
基金：
中国国家自然科学基金;
关键词：
PLATFORM;
D O I：
10.3788/COL201311.053003
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238 degrees. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm.
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页数：3
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