Experimental study of Fourier transform spectrometer based on MEMS micro-mirror

被引：9

作者：

Chen, Jianjun ^{[1
]}

Zhu, Yong ^{[1
]}

Liu, Bo ^{[1
]}

Wei, Wei ^{[1
]}

Wang, Ning ^{[1
]}

Zhang, Jie ^{[1
]}

机构：

[1] Chongqing Univ, Coll Optoelect Engn, Chongqing 400030, Peoples R China

来源：

CHINESE OPTICS LETTERS | 2013年 / 11卷 / 05期

基金：

中国国家自然科学基金;

关键词：

PLATFORM;

D O I：

10.3788/COL201311.053003

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238 degrees. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm.

引用

页数：3

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