The study and realization of standard dynamic signals of dynamic characteristic calibration for high precision displacement sensor

Sine signals and ellipse signals with frequencies (1-100) Hz are selected to calibrate the steady-state response characteristic of the displacement sensors, and impulse signals are selected to calibrate the transient-state response characteristic of the displacement sensors under the condition of non-periodic signal, after analyzing the working states and the frequency response range of the high precision displacement sensors during the actual measurement. These standard dynamic signals can be realized and traced to the length standard by a dynamic characteristic calibration and traceability device for the high precision displacement sensor that developed by NIM. And the dynamic characteristics of the inductance and capacitance sensors are calibrated by using this calibration and traceability device. It can be shown that the amplitude and phase deviations become bigger when the frequency is increased. The sensor accuracy used in the dynamic condition is reduced.