Towards Roll-to-Roll Deposition of High Quality Moisture Barrier Films on Polymers by Atmospheric Pressure Plasma Assisted Process

被引：57
|
作者：
Starostin, Sergey A. [1 ]
Creatore, Mariadriana [2 ]
Bouwstra, Jan B. [3 ]
van de Sanden, Mauritius C. M. [1 ,2 ]
de Vries, Hindrik W. [1 ]
机构：
[1] Dutch Inst Fundamental Energy Res DIFFER, NL-3430 BE Nieuwegein, Netherlands
[2] Eindhoven Univ Technol, Plasma & Mat Proc Grp, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands
[3] FUJIFILM Mfg Europe BV, Tilburg, Netherlands
来源：
PLASMA PROCESSES AND POLYMERS | 2015年 / 12卷 / 06期
关键词：
atmospheric pressure glow discharges (APGD); dielectric barrier discharges; gas diffusion barrier films; roll-to-roll reactors; water-vapour permeability; CHEMICAL-VAPOR-DEPOSITION; SIO2-LIKE FILMS; THIN-FILMS; DISCHARGE; COATINGS; LAYERS; TEMPERATURE; SMOOTH; CVD;
D O I：
10.1002/ppap.201400194
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An atmospheric pressure dielectric barrier discharge (DBD) was applied for the deposition of silica-like moisture barrier films on polyethylene 2,6 naphthalate foil. The diffuse plasma was sustained between two cylindrical drum electrodes in N-2/O-2/Ar gas flow with the addition of tetraethyl orthosilicate. The chemical composition, morphology and water vapour transmission rate of the moisture permeation barrier layers were studied as a function of the dynamic deposition rate and substrate temperature. It was demonstrated that dense silica-like layers of 100 nm thick with a good permeation barrier of approximate to 1.8 x 10(-3) g.m(-2).day (at 40 degrees C, 90% RH), corresponding to three orders of magnitude barrier improvement with respect to the pristine polymer, can be deposited in an atmospheric pressure process.
引用
收藏
页码：545 / 554
页数：10
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