Localized Ion-Beam Irradiation-Induced Wrinkle Patterns

被引:26
|
作者
Jeong, Hae-Chang [1 ]
Park, Hong-Gyu [1 ]
Lee, Ju Hwan [1 ]
Seo, Dae-Shik [1 ]
机构
[1] Yonsei Univ, Dept Elect & Elect Engn, Informat Display Device Lab, Seoul 120749, South Korea
关键词
local treatment; inhomogeneous pattern; ion beam; wrinkle; poly(dimethylsiloxane); THIN-FILMS; SURFACE; POLY(DIMETHYLSILOXANE);
D O I
10.1021/acsami.5b07147
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We observe a localized irradiation-induced wrinkle pattern on poly(dimethylsiloxane) (PDMS) via a long pattern mask. Localized ion-beam irradiation induces an inhomogeneous wrinkle pattern on the treated region. To confirm the inhomogeneity of the entire wrinkle pattern, its morphology was investigated using optical microscopy, which revealed separated regions in the wrinkle pattern. We used atomic force microscopy for quantitative analysis of the wrinkle pattern morphology and analyzed the angular distribution and the direction of compressive stress of the irradiated area. We confirmed the direction of stress release along the distance from the edges, and we achieved control of the orientation of the wrinkle pattern by altering the width of the irradiated area. Investigation of the inhomogeneities in a localized wrinkle formation provides an understanding of the formation mechanism to enhance its performance and application in various fields.
引用
收藏
页码:23216 / 23222
页数:7
相关论文
共 50 条
  • [31] ION-BEAM INDUCED OXIDATION OF SILICON
    HOLMEN, G
    JACOBSSON, H
    APPLIED PHYSICS LETTERS, 1988, 53 (19) : 1838 - 1840
  • [32] ION-BEAM INDUCED CRYSTALLIZATION IN BP
    KOBAYASHI, N
    KOBAYASHI, H
    KUMASHIRO, Y
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 : 550 - 552
  • [33] THE CHARACTERISTICS OF ION-BEAM-INDUCED SPONTANEOUS ETCHING OF GAAS BY LOW-ENERGY FOCUSED ION-BEAM IRRADIATION
    KOSUGI, T
    YAMASHIRO, T
    AIHARA, R
    GAMO, K
    NAMBA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11B): : 3242 - 3245
  • [34] ION-BEAM INDUCED WAFER CHARGING
    DOHERTY, BJ
    MCCARRON, DJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 559 - 562
  • [35] ION-BEAM INDUCED WHISKER FORMATION
    STRITZKER, B
    OCHMANN, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 135 - 136
  • [36] ION-BEAM INDUCED EPITAXY OF SILICON
    GOLECKI, I
    CHAPMAN, GE
    LAU, SS
    TSAUR, BY
    MAYER, JW
    PHYSICS LETTERS A, 1979, 71 (2-3) : 267 - 269
  • [37] ION-BEAM INDUCED POLYMERIZATION OF A DIACETYLENE
    ELMAN, BS
    THAKUR, MK
    SEYMOUR, RJ
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1986, 98 (1-4): : 139 - 149
  • [38] PRECIPITATION INDUCED BY ION-BEAM THINNING
    NJEGIC, A
    WILLIAMS, DB
    JOURNAL OF MICROSCOPY-OXFORD, 1981, 123 (SEP): : 293 - 297
  • [39] KEV ION-BEAM IRRADIATION OF POLYVINYLIDENE FLUORIDE (PDVF)
    TORRISI, L
    FOTI, G
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1995, 133 (04): : 247 - 257
  • [40] Nano-fabricated CDW by ion-beam irradiation
    Sumita, T.
    Nagai, T.
    Kubota, H.
    Matsukawa, T.
    Ohdomari, I.
    Synthetic Metals, 1999, 103 (1 -3 pt 3): : 2234 - 2237