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Shanghai Jiao Tong Univ, Dept Micro Nano Elect, Key Lab Thin Film & Microfabricat, Minist Educ,Natl Key Lab Sci & Technol Micro Nano, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Dept Micro Nano Elect, Key Lab Thin Film & Microfabricat, Minist Educ,Natl Key Lab Sci & Technol Micro Nano, Shanghai 200240, Peoples R China