Photoluminescence and photoelectron spectroscopic analysis of InGaAsN grown by metalorganic chemical vapor deposition

被引:11
|
作者
Chang, W
Lin, J
Zhou, W
Chua, SJ
Feng, ZC
机构
[1] Natl Univ Singapore, Dept Phys, Singapore 117542, Singapore
[2] Inst Mat Res & Engn, Singapore 117602, Singapore
[3] Axcel Photon Inc, Marlborough, MA 01752 USA
关键词
D O I
10.1063/1.1430857
中图分类号
O59 [应用物理学];
学科分类号
摘要
InGaAsN films and InGaAsN/GaAs quantum wells were grown by metalorganic chemical vapor deposition using 1,1-dimethylhydrazine and tetrirybutylarsice as N and As sources, respectively. A photoluminescence peak at 1.22 mum wavelength at low temperature was observed for the In0.26Ga0.74As1-yNy/GaAs quantum wells. X-ray photoelectron spectroscopy investigation on the InGaAsN films demonstrated the success of nitrogen incorporation and provided evidence of the existence of two principle N configurations, indicating the formation of N-In and N-O,H bonds. The addition of N atoms increases the In concentration in InGaAsN wafers, whereas postgrowth annealing results in In diffusion in surface region. (C) 2001 American Institute of Physics.
引用
收藏
页码:4497 / 4499
页数:3
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