Self-referenced multiple-beam interferometric method for robust phase calibration of spatial light modulator

被引:28
|
作者
Gao, Yunhui [1 ]
Li, Rujia [1 ]
Cao, Liangcai [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instruments, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
关键词
D O I
10.1364/OE.27.034463
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Phase-only liquid crystal spatial light modulator has wide ranging applications that require accurate phase retardance. The phase calibration of the spatial light modulator is therefore of vital importance. Available self-referenced calibration methods face the challenges of high time consumption, low efficiency, and low stability against the conditions. A self-referenced multiple-beam interferometric method is proposed to derive the global grayscale-phase response. As is presented theoretically and experimentally, the proposed method reduces the measuring time and improves the calibration efficiency by encoding multiple fringes in a single hologram. Results also show that the method is equally accurate when compared with traditional two-beam interferometric method, whereas providing a greater robustness against measuring errors since the standard deviation is only 56% of that of the traditional method. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:34463 / 34471
页数:9
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