A High Sensitivity 3-D Measurement Method of Minute Specimen Based on Microscope and Laser Projection

The aim of our research is to realize a high-sensitivity three-dimensional (3-D) shape measurement of target with an optical microscope. On the conventional method - shape from focus, it's to regulate focal length of microscope to obtain 3-D shape information of the specimen. However, the method is used the vertical stratification method to obtain 3-D shape information of total surface of target, and the variable focal length of zoom lens is limited therefore the measurement accurate is confined on the vertical direction. In order to solve these problems, we propose a high-sensitivity 3-D shape measurement method based on microscope and laser projection. The method is based on the slit pattern projection technique and 3-D image processing technique. The proposal method can be used for medicine, pharmacy, life science, and Material science.