Determination of the pore size and the vertical structure of nanoporous aluminum oxide membranes

The pore geometry of nanoporous aluminum oxide membranes which were prepared by anodization of aluminum in polyprotic acids were observed using focused ion beam technology (FIB) and high resolution scanning electron microscopy (SEM). For demonstration of the columnar structure of the nanopores, depth profiles were prepared with the FIB technology. Based on the detailed information about the pore geometry, the inner surfaces of the pores were calculated. (C) 1999 Elsevier Science B.V. All rights reserved.