Studies of a PT/PZT/PT sandwich structure for feram applications using sol-gel processing

被引：7
|
作者：
Ren, TL [1 ]
Zhang, LT [1 ]
Liu, LT [1 ]
Li, ZJ [1 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
INTEGRATED FERROELECTRICS | 2001年 / 39卷 / 1-4期
关键词：
PZT; PT; sandwich structure; sol-gel; ferroelectric; fatigue;
D O I：
10.1080/10584580108011944
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A silicon-based PbTiO3/Pb(Zr,Ti)O-3/PbTiO3 (PT/PZT/PT) sandwich structure with Pt electrodes are prepared by a sol-gel method. Effects of the PT buffer layers to the phase formation of the PZT films are studies. Dielectric and ferroelectric properties of the sandwich structure are measured. Maximum dielectric constant of about 900 is obtained at the coercive field 20 kV/cm. The leakage current density is less than 5 x 10(-9) A/cm(2) below 200 kV/cm, which is much lower than that of PZT/PT structure. And there is almost no fatigue even after 5 x 10(9) read/write cycles for the PT/PZT/PT sandwich structure.
引用
收藏
页码：1165 / 1172
页数：8
相关论文
共 50 条
  • [31] PREPARATION OF PT/ALUMINA CATALYSTS BY THE SOL-GEL METHOD
    BALAKRISHNAN, K
    GONZALEZ, RD
    JOURNAL OF CATALYSIS, 1993, 144 (02) : 395 - 413
  • [32] Sol-Gel processing of silica nanoparticles and their applications
    Singh, Lok P.
    Bhattacharyya, Sriman K.
    Kumar, Rahul
    Mishra, Geetika
    Sharma, Usha
    Singh, Garima
    Ahalawat, Saurabh
    ADVANCES IN COLLOID AND INTERFACE SCIENCE, 2014, 214 : 17 - 37
  • [33] Reactive ion etching of sol-gel derived PZT thin film and Pt/Ti bottom electrode for FRAM
    Tang, TA
    Chen, Z
    Li, N
    Zou, SX
    FERROELECTRICS, 1999, 232 (1-4) : 927 - 932
  • [34] The effect of acid mixture on the structure of sol-gel PZT fibers
    Zhang, M
    Salvado, IMM
    Vilarinho, PM
    MATERIALS LETTERS, 2003, 57 (26-27) : 4271 - 4275
  • [35] Sol-gel PZT and Mn-doped PZT thin films for pyroelectric applications
    Zhang, Q
    Whatmore, RW
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (15) : 2296 - 2301
  • [36] Composition, structure, and electrochemical behavior of sol-gel derived nanoparticulate Pt thin films
    Andreas, HA
    Birss, VI
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (11) : A1481 - A1488
  • [37] Sol-gel PZT and Mn-doped PZT thin films for pyroelectric applications
    Zhang, Q
    Whatmore, RW
    INTEGRATED FERROELECTRICS, 2001, 41 (1-4) : 1695 - 1702
  • [38] Preparation of PZT ferroelectric thin films by sol-gel processing and their properties
    Liu, MD
    Lu, CR
    Wang, PY
    Rao, YH
    Zeng, YK
    Li, CR
    SENSORS AND ACTUATORS A-PHYSICAL, 1995, 49 (03) : 191 - 194
  • [39] PREPARATION OF FERROELECTRIC PZT THIN-FILMS BY SOL-GEL PROCESSING
    OGIMOTO, Y
    MASUDA, Y
    OHTANI, N
    KOBA, M
    SHARP TECHNICAL JOURNAL, 1994, (59): : 11 - 15
  • [40] Local electrocatalytic induction of sol-gel deposition at Pt nanoparticles
    Schwamborn, Stefanie
    Etienne, Mathieu
    Schuhmann, Wolfgang
    ELECTROCHEMISTRY COMMUNICATIONS, 2011, 13 (08) : 759 - 762
12345