The spatial distribution of backscattered electrons calculated by a simple model

The spatial distribution of backscattered electrons is studied by the analytical model proposed by Everhart, which is based on large-angle single-scattering events. The Mott cross section is adopted to calculate the scattering angle instead of the Rutherford cross section used in the original Everhart model. Differences in the results are discussed between the two cross sections. Larger reflection coefficients and higher intensities in the spatial distributions of backscattered electrons are obtained from the calculations with the Mott cross section. The spatial distributions of all and the low-loss backscattered electrons are calculated for Al, Cu, and Au targets at 20 keV and the resolution of the backscattered electron image is evaluated.