Surface structures of femtosecond laser irradiated 4H-SiC crystal

被引：0
|
作者：
Tomita, T [1 ]
Kinoshita, K [1 ]
Matsuo, S [1 ]
机构：
[1] Univ Tokushima, Tokushima 770, Japan
来源：
2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS | 2005年
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.
引用
收藏
页码：1046 / 1047
页数：2
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