Modified gaseous electronics conference reference cell for the study of plasma-surface-gas interactions

The inductively coupled plasma (ICP) gaseous electronics conference (GEC) reference cell provides a standard system for the study of plasma sciences. In this article, we present a version of the ICP GEC cell that has been designed to allow studies of the interactions between a plasma, gas-phase chemistry, and surface-phase chemistry. Specifically, this modified GEC reference cell has specially designed interior walls that can be heated/cooled (10 to 200 degreesC) and moved. In addition, these walls can be coated with various materials (Al2O3, SiO2, Si, etc.). Design specifications and initial results are presented. These initial results provide an indication of the flexibility of this modified tool and the types of experiments that it should allow. (C) 2004 American Institute of Physics.